With the introduction of a stage at low temperature of plasma into the cycle of reaction of ALD, it is possible to provide the additional reactivity to surface in the form of plasma-produced species. This makes it possible ALD to be employed in an extent of the applications even broader by improving quality of film, [...]
Archive for the ‘nanotechnology’ Category
Applying the Atomic Layer Deposition (ALD) in the devices, nano-electronic probes and systems
All the companies of electronics take up the constant challenge to develop and market the products which are competing in the market. To carry out this which they look at more and more with the industry of nanotechnology so that the new processes manufacture electronic devices with configurations below nanometer 100. Such a process is [...]